Read e-book online Fundamentals of Semiconductor Manufacturing and Process PDF

By Gary S. May,Costas J. Spanos

ISBN-10: 0471784060

ISBN-13: 9780471784067

a pragmatic advisor to semiconductor production from strategy regulate to yield modeling and experimental design

basics of Semiconductor production and procedure regulate covers all concerns excited about production microelectronic units and circuits, together with fabrication sequences, strategy keep an eye on, experimental layout, approach modeling, yield modeling, and CIM/CAM structures. Readers are brought to either the idea and perform of all easy production concepts.

Following an outline of producing and know-how, the textual content explores method tracking tools, together with those who specialize in product wafers and those who specialize in the apparatus used to supply wafers. subsequent, the textual content units forth a few basics of facts and yield modeling, which set the root for a close dialogue of ways statistical approach keep an eye on is used to investigate caliber and increase yields.

The dialogue of statistical experimental layout deals readers a strong strategy for systematically various controllable technique stipulations and picking their impression on output parameters that degree caliber. The authors introduce strategy modeling recommendations, together with a number of complicated approach regulate issues resembling run-by-run, supervisory regulate, and approach and kit diagnosis.

severe insurance contains the following:
* Combines strategy keep watch over and semiconductor manufacturing
* distinctive therapy of approach and software program expertise and administration of total production systems
* Chapters comprise case reviews, pattern difficulties, and urged exercises
* teacher aid contains digital copies of the figures and an instructor's manual

Graduate-level scholars and commercial practitioners will enjoy the specified exami?nation of ways digital fabrics and provides are switched over into accomplished built-in circuits and digital items in a high-volume production environment.

An Instructor's handbook featuring precise options to all of the difficulties within the publication is on the market from the Wiley editorial department.

An teacher aid FTP website can be available.

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Fundamentals of Semiconductor Manufacturing and Process Control by Gary S. May,Costas J. Spanos

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